Close-up of a wafer with fully processed sensors.

Electron-optical and optoelectronic systems

The employees in the LEOS research cluster work on the realisation, characterisation and application of semiconductor-based sensor and actuator elements as well as laser-based technologies for processing and structuring a wide range of materials in cooperation with research institutes and industrial partners. In addition to a fully equipped clean room laboratory, the latest manufacturing methods for laser microstructuring and microprinting techniques are available for this purpose. We offer you competent expertise for application-oriented research in the fields of semiconductor technology, microsystems technology, optoelectronics, micromaterial processing and microsensor technology.

Goals & focal points

 

A symbiosis between basic and application-orientated research is to be created across faculties and universities and in cooperation with industrial partners. At the same time, the cross-sectional technologies of sensor technology and digitalisation are to be strengthened in the research profile of OTH Regensburg.

Publications by persons represented by OTH Regensburg can be found on the publication server.

Research topics

  • Micro- and nanostructures, optoelectronic and electron-optical systems - Prof. Dr Rupert Schreiner (OTH Regensburg)
  • Vacuum nanoelectronics, field emission electron sources (review article) - Prof. Dr Rupert Schreiner (OTH Regensburg)
  • Gas, pressure and flow sensors - Prof. Dr Rupert Schreiner, Prof. Dr Ioana Serban (OTH Regensburg)
  • Laser process technology - Prof. Dr Peter Bickel (OTH Regensburg), Prof. Dr Jürgen Koch (OTH Amberg-Weiden)
  • Measurement of optical properties - Prof. Dr.-Ing. Roland Schiek (OTH Regensburg)

News/Press releases

Our co-operation partners

 

We are happy to co-operate with industry, universities and Master's and Bachelor's students. If you have any questions, you can get in touch with our contact persons at any time.

Academic co-operation partners:

  • University of Wuppertal
  • European Organisation for Nuclear Research (CERN)
  • Fraunhofer ITEM
  • Institute of Scientific Instruments (ISI) Brno
  • Jožef Stefan Institute Ljubljana
  • Leibnitz Institute for Plasma Science and Technology Greifswald
  • Leibniz University Hanover
  • Braunschweig University of Technology
  • Berlin University of Technology
  • Technology Campus Teisnach (TH Deggendorf)
  • University of Augsburg
  • University of Regensburg
  • University of Tokyo

Industrial co-operation partners:

  • Airbus SE
  • Dr Sellmair NanoElektroTechnik GmbH
  • KETEK GmbH
  • OSRAM Opto Semiconductors GmbH
  • Rohde & Schwarz GmbH & Co. KG
  • Thyracont GmbH
  • Vitesco Technologies GmbH
  • Infineon Technologies AG

Current R&D projects

Demonstrator of a Pirani vacuum sensor

NEOVAK

Highly sensitive miniaturised thermal sensor elements and measurement methods based on them for applications in vacuum, gas and inertial sensor technology

The aim of the NEOVAK project is to develop miniaturised thermal sensor elements with which the entire technical vacuum range from 10-6 mbar to atmospheric pressure can be measured accurately and reliably with just a single element. Up to now, thermal vacuum sensors (so-called "Pirani" sensors) have had to be combined with other sensors to form a system in order to be able to detect the entire measuring range. By implementing suitable miniaturised sensor elements and combining them with dynamic measuring methods, this will no longer be necessary in future. The technology being developed here also promises further interesting applications in gas, position and motion sensor technology.

Cooperation partners: OTH Regensburg, Thyracont Vacuum Instruments GmbH

BTHA-FV9

New materials in additive manufacturing

 

Laser additive manufacturing processes are attracting a great deal of interest across all sectors, not least due to the opportunities for realising Industry 4.0 goals. However, the use of this technology is currently mainly reserved for large-scale industry, as they have the financial resources to purchase the necessary equipment. In the research project "New materials in additive manufacturing", these circumstances are taken into account through cross-border cooperation between various research institutions. Two universities in the Czech Republic are working with the Fraunhofer Institute UMSICHT and our research group at the OTH Amberg-Weiden on the fundamental research and further development of laser-based additive manufacturing processes. The aim of the project is to find new materials that can be processed using the method described.

Co-operation partners: OTH Amberg-Weiden, Fraunhofer Institute UMSICHT, University of Pilsen, Technical University of Ostrava

Testing an LED at wafer level

Research activities with the company Osram

In two projects with the company ams Osram, new concepts for LEDs are to be investigated and developed on the one hand, and ageing effects on optical components are to be investigated on the other. The aim is to gain a deeper understanding of the degradation of semiconductor lasers. To this end, an experimental setup is being developed that will enable this to be investigated under different environmental conditions.

Co-operation partners: OTH Regensburg, ams-OSRAM AG

Target-ETZ Project 185 3D-COVER

Cross-border research into additive manufacturing

The "3D printing" of metallic parts is a technology with high expectations for future manufacturing. In the project presented here, an international research team will be formed to deal with complex problems in materials research. The aim of the project is to describe the materials produced using LPBF technology (Laser Powder Bed Fusion) and to compare them with conventionally produced materials. LPBF technology enables the production of original parts, prototypes and samples with complicated geometries that are difficult to produce using conventional methods. Apart from the change in the design process, the properties of the parts produced in this way and the extent to which they differ from conventionally produced parts still need to be analysed. Gradual application of thin layers of metal powder, which are fused by means of a laser beam, cause high temperature gradients, which are sources of residual stresses. The probability of anisotropic material properties is high. It is therefore also important to understand and characterise the changes in properties that occur during the process. Thermo-physical properties will also be the subject of research. Collaboration between Czech and Bavarian research institutions is also crucial to the success of the 3D Cover target RTZ project, which is being supervised by OTH Amberg-Weiden.

Image of a miniaturised X-ray source

Si-FE-X

Development of X-ray sources based on black silicon field emission cathodes

 

Measurement methods based on X-rays are an important instrument for non-destructive material analysis or medical diagnosis. In current systems, thermal electron sources are used to generate X-rays. The aim of the project is to replace these with Si-based field emission electron sources in order to enable subsequent integration together with Si X-ray drift detectors to form a miniaturised system. The core component is a field emission cathode to be realised using Si semiconductor technology with a high emitter density combined with a high aspect ratio and homogeneous distribution. As there is currently no suitable measurement method for determining the current distribution to the individual emitters during operation in real time, the project aims to develop a suitable measurement method that will then form the basis for homogenising the emission of the FE array both during production and through suitable conditioning during operation. The vacuum-tight sealing of the X-ray source and the maintenance of a pressure of better than 10-5 mbar in the small volume of the chip housing over the entire service life of at least 2000 hours is a further challenge. By integrating a miniaturised vacuum sensor into the housing, the soldering process and other measures for maintaining the vacuum in the chip housing are to be investigated and improved.

Co-operation partners: OTH Regensburg, Ketek GmbH

Completed R&D projects

FEMION

Miniaturised, electrically pulsablefield emission electron source with lowcurrent fluctuation for use in an ionisation vacuumIonisation vacuum gauge

Conventional ionisation vacuum gauges work according to the principle of glow emission. The electrons emitted by heating a wire lead to the ionisation of the residual gas particles remaining in the vacuum; this makes it possible to measure an ion current. However, this glow cathode has considerable disadvantages: it cannot be operated in pulsed mode, has a high energy requirement and a short service life. For this reason, FEMION plans to replace the hot cathode with a field emission electron source with an operating voltage of less than 300 V. The FEMION approach is fundamentally based on field emission from semiconductors, in particular the comparatively inexpensive silicon.

Cooperation partners: OTH Regensburg, Thyracont Vacuum Instruments GmbH, University of Eastern Finland

FEXRay

Development of a field emission X-ray source for X-ray fluorescence analysis

The possibility of replacing the thermal electron source of X-ray tubes with miniaturised field emission electron sources made of silicon is being investigated. Suitable FE cathodes are to be produced and characterised using a microtechnological process. After integration into a housing to be constructed, including the X-ray target, the characteristics of the X-ray source will be measured. If such sources fulfil the requirements, chip-level integration, e.g. in SDD X-ray detectors, is possible.

Co-operation partners: OTH Regensburg, Bergische Universität Wuppertal, Ketek GmbH

FE-ToF-IMS

Development of a time-of-flight ion mobility spectrometer with a miniaturised fast pulsable field emission electron source

Ion mobility spectrometers (IMS) are used in many safety-related applications due to their high sensitivity, short measurement time and good separation performance. However, not all substances can be reliably detected due to chemical cross-sensitivities (false negatives). A prominent example is the detection of benzene in the presence of toluene. In addition, substance identification is not always possible (false positive). The pulsed ionisation method proposed here is intended to solve both problems. The basis is the development of a small IMS with a miniaturised, fast pulsable, non-radioactive electron source based on field emission cathodes, which are characterised by low energy requirements, as required for portable use. Substances such as benzene can thus be detected directly despite the presence of toluene without prior separation over time. A variable delay time between ionisation and recording of the spectrum also allows the ion-specific lifetime to be introduced as an orthogonal analysis parameter. This can further increase the reliability of substance identification.

Cooperation partners: OTH Regensburg, Leibniz Universität Hannover, Ketek GmbH

NOVAVAK

Development of a new type of gas-independent sensor system for the entire technical vacuum range

The planned "NOVAVAK" project is an application-orientated research project in the field of vacuum technology, which is an important
sub-area of sensor technology. The aim of the project is the design, development and realisation of a new type of gas-independent sensor system for the entire technical vacuum range based on the possibilities of microsystems technology.

Co-operation partners: OTH Regensburg, Thyracont Vacuum Instruments GmbH

ELWIT

Enabling Laminar Wing Technology

The ELWIT project aims to develop a MEMS demonstrator for aerodynamic boundary layer control. The prototype should be able to move air with sufficient force electrically via the effect of the ion wind or a
plasma discharge. The aim is to find an electrode structure that is robust and durable against environmental influences (moisture, mechanical strength, dust). This design should have a positive influence on the flow conditions in commercial aircraft and thus lead to fuel savings.

Co-operation partners: OTH Regensburg, INP Greifswald, Bremen University of Applied Sciences, Airbus D&S, University of the Federal Armed Forces Munich

Femtovak

Novel fast switchable optically induced field emission electron sources for vacuum and gas sensor applications

The aim of the project was to realise a switchable optically assisted electron source in a diode and triode arrangement made of silicon for applications in vacuum and gas sensor technology. In addition to the expected advantages of field emission compared to glow emission, such as lower susceptibility to shocks, or improved resolution in pressure determination due to the more monoenergetic electron emission, an electron source that can be quickly modulated in time would enable a series of further dynamic investigations. In the project, both the electron source and an ionisation vacuum sensor based on it were developed in close cooperation with our project partners.

Co-operation partners: OTH Regensburg, Bergische Universität Wuppertal, Thyracont Vacuum Instruments GmbH

Contact us

Cluster spokesperson: Prof. Dr Rupert Schreiner (OTH Regensburg)

Deputy Cluster Spokesperson:Prof. Dr.-Ing. Jürgen Koch (OTH Amberg-Weiden)

Research assistant:Matthias Hausladen (OTH Regensburg)