Frisch bewilligt

high-RISE: Intelligent early warning system for semiconductor production

The high-RISE project is developing a photoacoustic measurement technology that analyses process gases to detect production errors in semiconductor manufacturing at an early stage, thereby improving efficiency and the use of resources.

Who is involved in the high-RISE project?

Project management: Dr Thomas Rück

Collaborators: Lukas Escher

What is your research project about?

Our project is about improving the monitoring of production processes in the semiconductor industry. To do this, we measure certain gases that are produced during production and can indicate problems. This allows faults to be recognised at an early stage, even before damage occurs. The aim is to develop a technology that can later be used directly in industry.

What excites you about the project?

I am excited by the fact that we can visualise invisible processes. Our measurements give us a better understanding of what happens inside a complex production process. What is particularly exciting is that we are combining modern photoacoustic laser technology with intelligent analysis. Our work also has direct benefits for industry and can help to save resources. It motivates us to work on a solution that will actually be used later on.

How can findings from the project be applied in practice?

The results help to recognise and avoid errors in production at an earlier stage. This saves material, time and costs. The technology can be integrated directly into production systems and run there continuously. This makes processes more reliable and efficient. Similar measurement methods could later be used in environmental monitoring or energy technology.

Answers from Dr Thomas Rück, OTH Regensburg

 

On our website you will find an overview of the current funding projects at OTH Regensburg.

Photo: OTH Regensburg / AI-generated